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thickness & hybrid inspection

UniScan-T / ST

Precision metrology solution combining thickness measurement and foreign-material inspection in one system.

UniScan-T measures film, coating, glass and laminated structures in real time without contact. UniScan-ST combines surface-defect inspection and thickness metrology in a single system to improve space efficiency and quality-control productivity.

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UniScan-T film thickness measurement system image extracted from the PPT

01

Non-contact precision metrology

02

OCT/interferometry for transparent materials

03

Surface defect + thickness integrated inspection

04

Film, coating, glass and multi-layer film support

Key specs

  • 0.5~60um thickness range
  • Accuracy 1.00%
  • Precision 0.30%
  • Visible / NIR wavelength
  • Up to 140m/min hybrid line

Inspection items

  • Coating thickness
  • Film thickness
  • Uncoating
  • Pinhole
  • Contamination
  • Hybrid defect + metrology

Applications

  • • Coating layer
  • • Transparent material
  • • Multi-layer thin film
  • • R2R hybrid inspection
UniScan-T / ST reference 1
UniScan-T / ST reference 2
UniScan-T / ST reference 3
UniScan-T / ST reference 4

Related technologies

High-speed imagingOptics & lightingAI inspection algorithmsMetrology & line integration