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Thickness Metrology

Coating and film thickness metrology

OCT and optical-interference based metrology for coating layers, transparent materials and micro thin films in the 0.5–60um range.

Interferometry, Confocal and Laser thickness metrology image

Process challenge and UniEye approach

OCT and optical-interference based metrology for coating layers, transparent materials and micro thin films in the 0.5–60um range.

  • OCT/interferometry thin-film metrology
  • Confocal/Laser sensor selection
  • Non-contact high-speed inspection
  • Transparent, opaque, single-layer and multi-layer support

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