Thickness Metrology

Coating and film thickness metrology

OCT and optical-interference based metrology for coating layers, transparent materials and micro thin films in the 0.5–60um range.

Interferometry, Confocal and Laser thickness metrology image

Process challenge and UniEye approach

OCT and optical-interference based metrology for coating layers, transparent materials and micro thin films in the 0.5–60um range.

OCT/interferometry thin-film metrology
Confocal/Laser sensor selection
Non-contact high-speed inspection
Transparent, opaque, single-layer and multi-layer support

Related products

UniScan-T film thickness measurement system image extracted from the PPT

thickness & hybrid inspection

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Precision metrology solution combining thickness measurement and foreign-material inspection in one system.

UniScan-TX offline thickness measurement image extracted from PPT

offline thickness measurement

UniScan-TX

다품종 샘플 측정과 QA/QC를 위한 오프라인 필름 두께 측정기.

Glass and optical film inspection reference image

VLT measuring system

UniScan-V

투명·반투명 소재의 광 투과율을 정밀 측정하고 기준 이탈을 감지하는 검사 시스템.